A Study on Laser Micromachining
نویسندگان
چکیده
منابع مشابه
Excimer laser microfabrication and micromachining
Excimer lasers are proving to be highly successful for fabricating industrial components with feature sizes in the range between 0.05–1,000μm (see Fig. 1). As well as providing a 15 year, 5 generation extension to optical lithography as used in the manufacture of silicon chips, excimer lasers are used for microfabricating many of the critical features in a wide variety of the electronic and tel...
متن کاملLaser Micromachining of Chemically Altered Polymers
During the last decade laser processing of polymers has become an impoxtant field of applied and fundamental research. One of the most promising proposal, to use laser ablation as dry etching technique in photolithography, has not yet becume an industrial application. Many disadvantages of laser ablation, compared to conventional photolithography, are the result of the use of standard polymers....
متن کاملFemtosecond Laser Micromachining of Single-crystal Superalloys
Investigations on femtosecond laser micromachining of single crystal superalloys with and without plasma-sprayed thermal barrier coatings were conducted under laser fluences ranging from 0.1 J/cm up to 160 J/cm. Micromachining was carried out in air using a titanium:sapphire laser system ( = 780 nm) operating at a repetition rate of 1 kHz and delivering individual pulses of ~150 fs duration. Th...
متن کاملLiquid-immersion laser micromachining of GaN grown on sapphire
Liquid-immersion nanosecond-pulsed laser micromachining is introduced as an efficient way for device isolation and rapid prototyping on GaN-on-sapphire wafer. Using deionized water as an ambient medium for laser micromachining, smooth trenches that are free from redeposition can be formed in the GaN layer. Coupled with the large difference between the ablation thresholds and ultraviolet absorpt...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: MATEC Web of Conferences
سال: 2018
ISSN: 2261-236X
DOI: 10.1051/matecconf/201820702010